International Standard
ISO 13424:2013
Surface chemical analysis — X-ray photoelectron spectroscopy — Reporting of results of thin-film analysis
Reference number
ISO 13424:2013
ISO 13424:2013
Edición 1
2013-10
2013-10
© ISO 2024
International Standard
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ISO 13424:2013
53773
No disponible en español
Publicado
(Edición 1, 2013)
Esta norma se revisó y confirmó por última vez en 2021.
Por lo tanto, esta versión es la actual.
Resumen
ISO 13424:2013 specifies the minimum amount of information required in reports of analyses of thin films on a substrate by XPS. These analyses involve measurement of the chemical composition and thickness of homogeneous thin films, and measurement of the chemical composition as a function of depth of inhomogeneous thin films by angle-resolved XPS, XPS sputter-depth profiling, peak-shape analysis, and variable photon energy XPS.
Informaciones generales
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Estado: PublicadoFecha de publicación: 2013-10Etapa: Norma Internacional confirmada [90.93]
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Edición: 1Número de páginas: 46
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Comité Técnico :ISO/TC 201/SC 7ICS :71.040.40
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