International Standard
IEC/TR 63258:2021
Nanotechnologies — A guideline for ellipsometry application to evaluate the thickness of nanoscale films
Reference number
IEC/TR 63258:2021
IEC/TR 63258:2021
Edición 1
2021-03
2021-03
© ISO 2024
International Standard
Resumen
IEC TR 63258:2021 is a Technical Report focused on the practical protocol of ellipsometry to evaluate the thickness of nanoscale films. This document does not include any specification of the ellipsometers, but suggests how to minimize the data variation to improve data reproducibility.
Informaciones generales
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Estado: PublicadoFecha de publicación: 2021-03Etapa: Norma Internacional publicada [60.60]
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Edición: 1Número de páginas: 16
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Comité Técnico :ISO/TC 229ICS :07.120
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