Résumé
This document describes a procedure for the quantitative characterization of the probe tip of an atomic force microscope (AFM) probe and a restoration of AFM topography images dilated by finite probe size. The three-dimensional shape of the probe apex is extracted by image reconstruction using suitable reference materials. This document is applicable to the reconstruction of AFM topography images of solid material surfaces.
Informations générales
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État actuel: PubliéeDate de publication: 2022-07Stade: Norme internationale publiée [60.60]
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Edition: 1
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Comité technique :ISO/TC 201/SC 9ICS :71.040.40
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