Abstract
ISO 24236:2005 specifies a method for evaluating the constancy and repeatability of the intensity scale of Auger electron spectrometers, for general analytical purposes, using an electron gun with a beam energy of 2 keV or greater. It is only applicable to instruments that incorporate an ion gun for sputter cleaning. It is not intended to be a calibration of the intensity/energy response function. That calibration may be made by the instrument manufacturer or other organization. The present procedure provides data to evaluate and confirm the accuracy with which the intensity/energy response function remains constant with instrument usage. Guidance is given on some of the instrumental settings that may affect this constancy.
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General information
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Status: PublishedPublication date: 2005-04Stage: International Standard confirmed [90.93]
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Edition: 1Number of pages: 14
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Technical Committee :ISO/TC 201/SC 7ICS :71.040.40
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