Status : Published (Under review)
This standard was last reviewed and confirmed in 2022. Therefore this version remains current.
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Abstract

ISO 13083:2015 describes a method for measuring the spatial (lateral) resolution of scanning capacitance microscopes (SCMs) or scanning spreading resistance microscopes (SSRMs), which are widely used in imaging the distribution of carriers and other electrical properties in semiconductor devices. The method involves the use of a sharp-edged artefact.

General information

  • Status
     : Published
    Publication date
     : 2015-08
    Stage
    : International Standard confirmed [90.93]
  • Edition
     : 1
    Number of pages
     : 14
  • Technical Committee :
    ISO/TC 201/SC 9
    ICS :
    71.040.40 
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Sustainable Development Goals

This standard contributes to the following Sustainable Development Goal

9
Industry, Innovation and Infrastructure

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