Abstract
This document describes a procedure for the quantitative characterization of the probe tip of an atomic force microscope (AFM) probe and a restoration of AFM topography images dilated by finite probe size. The three-dimensional shape of the probe apex is extracted by image reconstruction using suitable reference materials. This document is applicable to the reconstruction of AFM topography images of solid material surfaces.
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General information
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Status: PublishedPublication date: 2022-07Stage: International Standard published [60.60]
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Edition: 1Number of pages: 15
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Technical Committee :ISO/TC 201/SC 9ICS :71.040.40
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