ISO/AWI 23131-3
Ellipsometry — Part 3: Transparent single layer model
Reference number
ISO/AWI 23131-3
Edición 1
© ISO 2024
Working draft
En desarrollo
Un grupo de trabajo ha preparado un borrador.

Resumen

This document uses ellipsometric measurements and their analysis to specify the method for the determination of the layer thickness d of a transparent layer and the optical (refractive index n) or dielectric (real part ε1) constants/functions based on the transparent single layer model within a spectral region, for which k = 0 applies.

Informaciones generales

  • Estado
     : En desarrollo
    Etapa
    : Nuevo proyecto registrado en el programa de trabajo TC/SC [20.00]
  • Edición
     : 1
  • Comité Técnico :
    ISO/TC 107
  • RSS actualizaciones

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